JPS64326U - - Google Patents
Info
- Publication number
- JPS64326U JPS64326U JP9509887U JP9509887U JPS64326U JP S64326 U JPS64326 U JP S64326U JP 9509887 U JP9509887 U JP 9509887U JP 9509887 U JP9509887 U JP 9509887U JP S64326 U JPS64326 U JP S64326U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- partition wall
- generation chamber
- drawer window
- plasma generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 3
- 230000005284 excitation Effects 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 238000000605 extraction Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9509887U JPS64326U (en]) | 1987-06-19 | 1987-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9509887U JPS64326U (en]) | 1987-06-19 | 1987-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS64326U true JPS64326U (en]) | 1989-01-05 |
Family
ID=30959243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9509887U Pending JPS64326U (en]) | 1987-06-19 | 1987-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS64326U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02197122A (ja) * | 1989-01-26 | 1990-08-03 | Fujitsu Ltd | マイクロ波プラズマ処理装置 |
| JPH02127031U (en]) * | 1989-03-28 | 1990-10-19 |
-
1987
- 1987-06-19 JP JP9509887U patent/JPS64326U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02197122A (ja) * | 1989-01-26 | 1990-08-03 | Fujitsu Ltd | マイクロ波プラズマ処理装置 |
| JPH02127031U (en]) * | 1989-03-28 | 1990-10-19 |